Sem is a versatile instrument that is capable of imaging a wide range of materials from uncoated soft tissues to hard rocks in variable pressure conditions. For materials science, these new instruments address the need to investigate a wide variety of materials and characterize structure and composition. The xl30 is a conventional sem with optimum performance for both imaging and microanalysis of conductive andor coated specimens. Before using the microscope, first you should use your assigned username and password to login to the.
Typically, when the sem changes from one magnification range to another, an audible click may be heard andor a glitch may be seen on the sem image. Feiphilips xl30 field emission esem center for electron. This is an excellent tool for both experienced and firsttime users. Philips fei xl30 sem edax xray analysis scanning electron. Leaving the sem for the next user 29 decrease the magnification to the minimum value. The philips xl30 esem is a flexible scanning electron microscope with a large chamber. Additionally, keypad the rdy fight will bfink on the xl4612rm or xl4612sm. Tv is not of much use when the gaseous secondary detector is in use. The integration of advanced electron optics and extensive system automation with a unique, highlevel user shell has produced a precision instrument with exceptional levels of product data sheet versatile conventional sem low cost of ownership windows nt network compatible. The sem is utilized by a diverse user group, from forensics, biomedical engineers, biologists and hard material scientists to geologists and failure analysts.
Then you can save the image as a tiff or jpeg image in the xl30 shared data folder on desktop. After vacuum reaches 105, click the 60% button to put the turbopump at 60% speed. This directive applies to products or appliances with an intrinsic function for the end user in which. Be sure the lever on the black manual valve behind the microscope column is at hivac position. The xl 30 offers a 4 axis motorized stage with full manual override. The kavli nanoscience institute at caltech,287 views. Thermo scientific introduces quattro sem for materials science, an ultraversatile highresolution. General operating procedures january 14 th16 follow the directions listed under general operating procedures for the philips xl30 sem. It is easy to use for examining and survey the morphology of the nano.
Philips xl 40 esem electron optics facility michigan. Safe usage of smif sem2 feixl30 esem dont press the buttons on the sem module on the front of the chamber. In general, a higher beam voltage penetrates the sample more, leading to a lack of surface specificity in the image. The philips xl30 sem operation procedure this section adapted from the philips user manual chapter 4, for detail, please refer to the user manual this chapter describes the basic operation of the microscope, involving several steps to achieve hardcopy results or image transfers to disk. Xl30 image display to the screen on the right side. View and download philips xl300 user manual online. Optimum performance of the sem for any particular application depends on the selection of the correct beam conditions. The xl fegsfegsirion scanning electron microscope operating. All the quanta sem systems can be equipped with analytical systems, such as energy dispersive spectrometer, wavelength dispersive xray spectroscopy and electron backscatter diffraction. This means that wet, oily, dirty, outgassing, and nonconductive samples can be examined in their natural state without significant sample modification or preparation.
Operating voltage should be set to 15kev or higher and a spot size of 4 or 5 is recommended. We have 1 sanitas sem 30 manual available for free pdf download. The microscope can be operated both at low accelerating voltage 200v and high accelerating voltage 30kv. Basic sem alignment source tilt, focus, astigmatism, lens alignment duration. This btink ie slightly faefer than the indcation for the staymode. Close chamber, switch manual valve to hivac if necessary, and click pump. This makes the system ideal for dedicated research in metallography as. The upper group of controls allow the user to choose the scan rate. The magnification is up to 800,000x with 2 nm resolution. Advanced accessories include a thinwindow energy dispersive spectrometer eds and hot or cold stages. Philips scanning electron microscope xl30 feg departement.
Philips fei xl30 feg sem with edax eds complete system. Feiphilips xl30 field emission esem the xl30 esem combines a highbrightness feg source with a conventional electron column. The results are good, high quality products with maximum process reliability, which make production processes more efficient. Fei highperformance electron microscopy workflow solutions. You should refer to these procedures to assist you with your session. It can be used for conventional high vacuum imaging, or in the environmental mode, can be used to examine wet, oily, gassy or nonconducting samples. Feiphilips xl30 feg esem, with electron backscatter diffraction analysis and energydispersive xray capability esem images from philips electron optics this microscope is a high performance, extremely flexible and wellequipped microscope for general purpose microscopy, lowvacuum and environmental scanning microscopy esem, and electron. Npgs solutions to problems npgs for sem lithography. Fei xl30sfeg highresolution scanning electron microscope the xl30sfeg is a highresolution scanning electron microscope capable of resolutions better than 2 nm, magnifications over 600 kx, and operating voltages from 200 volts up to 30 kv with 1 kv and 2 kv being routine. Disclaimer benq corporation makes no representations or warranties, either expressed or implied, with respect to the contents hereof and specifically disclaims any warranties, merchantability or fitness for any particular purpose.
It is assumed that the instrument has been started up. The xl30 esemfeg employs the stable, high brightness schottky field emission source for outstanding observation performance of. The magnification is up to 800,000x with 2nm resolution. On the 7015 keypade the instant indicator will be on. Florida center for analytical electron microscopy college. If the images are saved correctly in the shared data folder on sem computer, you should be able to find your data in the shared data folder for xl30 on the computers in. The xl30 sem feg offers high resolution secondary electron imaging at pressures as high as 10 torr and sample temperatures as high as 1,000c. It is easy to use for examining and survey the morphology of the nano devices. Removed by request from fei the quanta feg user operation manual 4022 290 22214. This user manual gives an overview of the application, administration, interpretation and reliability and validity of the mlq30 normative questionnaire. Scanning electron microscope operation page 9 of 85 author.
A certificate of conformity is available from sem sales on request. The fei philips xl 40 environmental scanning microscope is a large chamber scanning electron microscope capable of imaging hydrated and contaminated samples. The quanta sem line now includes even more flexibility with the release of the quanta 50 sem series. If the images are saved correctly in the shared data folder on sem computer, you should be able to find your data in. Feiphilips xl30 feg esem, with electron backscatter diffraction analysis and energydispersive xray capability. Enclosures for protection against the high voltages of the sem power supply e. Thermo scientific introduces prisma e sem for materials science, the most complete sem for multiuser laboratories requiring allround performance and easeofuse.
The xl30 is the conventional scanning electron microscope of the xl series from philips and is suitable for a wide variety of applications. A field emission high resolution sem equipped with oxford eds. User friendliness is a special benefit of the xl30. The philips feg sem handbook this section adapted from the philips user manual chapter 4 this chapter describes the basic operation of the microscope, involving several steps to achieve hardcopy results or image transfers to disk. On the other hand, if xray analysis is desired, a high beam voltage is usually essential, as the voltage. Sem dc servomotors in the ranges mt22, mt30, mt40 and mt52 conform to the ec directive. Eliminating the weight and bulk associated with competitive devices, janams xg3 is the lightest industrialgrade mobile computer in its class. Xl30 esem with npgs sop department of chemistry hku. Philips xl30 feg sem is located in room 140 engineering tower building 303 on uci campus map philips xl30 feg sem with eds noran 6 system is a thermionic field emission sem which is fully automatic gun configuration controlled by advanced computer technology. This manual for your standard xl scanning electron microscope is. Sanitas sem 30 manuals manuals and user guides for sanitas sem 30. A ccd camera is mounted to allow the user to control the position of the sample inside the specimen chamber. Apr 23, 2017 basic sem alignment source tilt, focus, astigmatism, lens alignment duration. After tv, the fastest is slow scan 1, the slowest is slow scan 3.
The quanta line of scanning electron microscopes are versatile, highperformance instruments with three modes high vacuum, low vacuum and esem to accommodate the widest range of samples of any sem system. Fei xl30 sfeg highresolution scanning electron microscope the xl30 sfeg is a highresolution scanning electron microscope capable of resolutions better than 2 nm, magnifications over 600 kx, and operating voltages from 200 volts up to 30 kv with 1 kv and 2 kv being routine. Philips electron optics xl30 sem scanning electron microscope set up with detectors for energydispersive xray spectroscopy edx or edax pw 663005 9432 066 30001. All maintenance should follow the procedure s set forth in the manufacturers maintenance and operations manuals. Unlike conventional sems which require high vacuum in the specimen chamber, the microscope can be run in a highpressure environmental mode allowing the examination of hydrated or insulating samples. Philips xl30 feg sem with edax eds system is a thermionic field emission sem which is fully automatic gun configuration controlled by advanced computer technology. This xl30 also equipped with eds detector to provide the composition information. This microscope is a high performance, extremely flexible and wellequipped microscope for general purpose microscopy, lowvacuum and environmental scanning microscopy esem, and electron. Emcdirective electro magnetic compatibility 89336eec. The immersion lens technique pushes the resolution to nm order while complete computer control guarantees user friendly operation. The philipsfei xl30 esem environmental scanning electron microscope can perform high vacuum, low vacuum and wet modes imaging from 1kv30kv and 10x100,000x magnification. C load a sample and evacuate the chamber c obtain an electron beam c obtain a secondary electron image c learn to focus.
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